Final Thesis On The Topic: Particle Wafer

vor 2 Wochen

Dresden, Deutschland Fraunhofer-Gesellschaft Vollzeit

The **High Performance Technology **area, in which the position is located, is responsible for the fields of back-end-of-line metallization and packaging as well as the enablement of CMOS near quantum technologies. Current developments focus on process modules for spin qubits, superconduction qubits as well as system assemblies. During your thesis you will investigate the interaction between organic particles and different ILD materials after Cu-CMP.

**What you will do**

After the chemical mechanical polishing (CMP) of copper interconnect on 300mm wafers, organic residues are critical for the process yield. To enable a dedicated particle removal approach, the surface properties as well as the interaction between particles and wafer surface need to be understood.

For this investigation wafers coated with different dielectric materials will be processed by CMP. Lab studies by different surface analysis techniques will be performed e. g. surface potential measurement, cp-AFM, XPS, etc.

These tasks can be worked on as part of a **bachelor´s, master´s or diploma thesis.**

**What you bring to the table**
- Studies in the field of Physics, Chemistry, Material Science or a related field
- A strong interest in surface and interfacial science and independent laboratory work
- You can score with a lot of commitment, organizational and communicational skills and team spirit
- Very good English skills complete your profile

**What you can expect**

We offer you an exciting topic and individual support in the preparation of your thesis by experienced employees. A motivated and dynamic team awaits you in a very well equipped, research and development environment. In addition, we offer you connecting points within the framework of your studies or your career entry, e.g. a following PhD, the beginning of your scientific career as a junior scientist at Fraunhofer IPMS or becoming an engineer. We support you in this process

The scientific work will be carried out in the research group **High Performance Technology **at Fraunhofer IPMS in Dresden. The examination takes place via affiliation with a German university of applied sciences and is governed by the respective state university law.

With its focus on developing key technologies that are vital for the future and enabling the commercial utilization of this work by business and industry, Fraunhofer plays a central role in the innovation process. As a pioneer and catalyst for groundbreaking developments and scientific excellence, Fraunhofer helps shape society now and in the future.

**Contact**

Mrs. Sabrina Weimert
Human Resources
Phone: +49 (0)351 8823 415

Mrs. Wu Haosheng
Specialty Department
Phone: +49 (0)351 2607 3244

Fraunhofer Institute for Photonic Microsystems IPMS

Requisition Number: 67266

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