Phd Thesis: Integration of Low Stress Copper Into

vor 2 Wochen

Dresden, Sachsen, Deutschland GLOBALFOUNDRIES Vollzeit
[English Version see below] _

**Über GlobalFoundries**

Globalfoundries ist ein weltweit führender Auftragsfertiger für die globale Halbleiterindustrie mit Werken in Dresden, Singapur, New York und Vermont (USA). Unsere Produkte finden Verwendung in verschiedenen technischen Anwendungen, z.B. mobiler Kommunikation, Unterhaltungselektronik, Automotive und Internet der Dinge. Weltweit beschäftigt Globalfoundries circa Mitarbeitende, davon rund 3.000 in Dresden.

**Promotion über BEoL Lösungen für RF Produkte der nächsten Generation: Integration von stressarmem Kupfer in ultradicke Umverdrahtungsebenen**

Das GlobalFoundries Ph.D. Programm eröffnet Doktoranden die einmalige Möglichkeit, die Integration von leading-edge Halbleitern mitzugestalten. Die Arbeit setzt auf einer bereits existierenden Integration mit ultradickem Kupfer auf, mit welchem signifikante Prozessprobleme aufgrund von Eigenspannungen im Kuper und deren Abhängigkeit vom Chipdesign adressiert werden sollen.

Diese Position ist auf 3 Jahre ausgelegt. Für diese Arbeit suchen wir einen wissenschaftlichen Mitarbeiter, der im Verbundprojekt sowohl eine koordinative Rolle übernehmen möchte als auch seine Forschungsarbeit an Fragestellungen der Massenfertigung ausrichtet. Dabei unterstützen Sie das Team bei der Experimentplanung und der Koordination der Fertigung der Wafer, insbesondere der Kupferabscheidung. Desweiteren wird die Charakterisierung der prozessierten Kupferverdrahtungsebenen von Ihnen selbstständig organisiert und koordiniert. Hierbei kann auf vorhandene Infrastruktur und Expertise zurückgegriffen werden, teilweise sollen Messungen extern erfolgen. Die Ergebnisse werden von Ihnen systematisch dokumentiert und im Rahmen regelmäßiger Berichterstattung zusammengefasst. GF unterstützt die Veröffentlichung wissenschaftlicher Ergebnisse in führenden Fachzeitschriften und den Schutz des geistigen Eigentums durch die Einreichung von Patenten.

**Erforderliche Qualifikationen**
- Sie haben Elektrotechnik mit Schwerpunkt Mikrotechnologie, Werkstoffwissenschaft, Physik oder ein vergleichbares Studium absolviert oder sind kurz vor dem Abschluss,
- Sie besitzen grundlegende Kenntnisse auf dem Gebiet der Halbleiterbauelemente und deren Funktionsweise,
- Kenntnisse der Halbleitertechnologie, sowie Halbleiterfertigung sind von Vorteil,
- Idealerweise haben Sie solide Kenntnisse in der Finiten Elemente Simulation von Verformungsprozessen
- Sie haben Erfahrung im Bereich der elektrolytischen Abscheidung und Charakterisierung von dünnen Metallschichten
- Ein sicherer Umgang mit Office Programmen zur Textverarbeitung und Präsentation werden vorausgesetzt,
- Sie verfügen über ein hohes Maß an Selbstständigkeit und zeitliche Flexibilität für die Kommunikation mit den globalen Teams,
- Sie sind kommunikativ und arbeiten gerne im Team,
- Gute Englischkenntnisse in Wort und Schrift runden Ihr Profil ab.

**Zeitraum**
- Ab sofort für 3 Jahre befristet.
- ______________________________________________

**About GF**

GlobalFoundries Inc. (GF) is one of the world's leading semiconductor manufacturers. GF redefines innovation and semiconductor manufacturing by developing and delivering feature-rich process technology solutions with leading performance in all growth markets. GF offers a unique mix of design, development and manufacturing services. With a talented and diverse team and manufacturing locations in the U.S., Europe and Asia, GF is a trusted technology provider to its global customers. GF employs approximately 13,000 people, including more than 3,000 in Dresden, Germany.

**PhD on BEoL Solutions for RF Products of the next generation: Integration of low stress Copper into ultra-thick BEoL Redistribution Layers**

The GlobalFoundries Ph.D. program provides Ph.D. students with a unique opportunity to help shape the integration of BEoL features into leading-edge logic semiconductors. The task is starting with an existing integration scheme with certain process challenges due to residual stresses in Copper and their dependence on the chip design.

The contract for this position is setup for 3 years with a possibility to extend by one additional year, if required. We are looking for a research associate who would like to take a coordinating role in a joint project with other partners from academia and industry as well as in aligning his or her research work to the requirements of later mass production. You will support the team by coordinating the planning of experiments and co-ordination of waferprocessing, with special focus on the electrolytic copper deposition. You will organize and coordinate the characterizaton oft the deposited films as well as integrated layers independently. For this purpose, existing infrastructure and expertise will be used, partially measurements have to be done outside of GF. You will systematically document and present the results in regular reports. GF supports the publication of scient

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